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Digital sound reconstruction using arrays of CMOS-MEMS ...
https://www.researchgate.net/publication/3936517_Digital_sound_reconstruction_using_arrays_of_CMOS-MEMS_microspeakers#:~:text=CMOS-MEMS%20micromachining%20techniques%20allow%20the%20integration%20of%20hundreds,properties%20to%20produce%20acoustic%20responses%20useful%20for%20DSR
CMOS-MEMS MEMBRANE FOR AUDIO-FREQUENCY …
https://research.ece.cmu.edu/~mems/pubs/pdfs/ieee/mems/0021_neumann-2001.pdf
Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 kHz. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed at CMU [1]. The ability to build a membrane directly on a standard CMOS chip, integrating mechanical structures with
CMOS-MEMS membrane for audio-frequency acoustic …
https://www.sciencedirect.com/science/article/pii/S0924424701007282
Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that generates audible acoustic output from 40 Hz to 10 kHz. The fabrication of the acoustic membrane consists of only two additional steps subsequent to the prior post-CMOS micromachining steps developed at Carnegie Mellon University [Sens. Actuat.
CMOS-MEMS membrane for audio-frequency acoustic …
https://www.sciencedirect.com/science/article/abs/pii/S0924424701007282
CMOS-MEMS membrane for audio-frequency acoustic actuation ... Abstract. Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that generates audible acoustic output from 40 ...
CMOS-MEMS membrane for audio-frequency acoustic …
https://www.researchgate.net/publication/3889935_CMOS-MEMS_membrane_for_audio-frequency_acoustic_actuation
CMOS-MEMS membrane for audio-frequency acoustic actuation February 2001 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 95(2):236 - 239
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