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A fully-integrated CMOS-MEMS audio microphone | IEEE ...
https://ieeexplore.ieee.org/abstract/document/1215295/
A fully-integrated CMOS-MEMS audio microphone Abstract: We report on the construction of a microphone and associated electronics fabricated entirely within a standard CMOS (complementary metal oxide semiconductor) die. An A-weighted noise level of 46 dB SPL was achieved with a total diaphragm area of 0.61 mm/sup 2/. Because the microphone uses ...
A fully-integrated CMOS-MEMS audio microphone
https://www.researchgate.net/publication/4024594_A_fully-integrated_CMOS-MEMS_audio_microphone
Download Citation | A fully-integrated CMOS-MEMS audio microphone | We report on the construction of a microphone and associated electronics fabricated entirely …
[PDF] A fully-integrated CMOS-MEMS audio microphone ...
https://www.semanticscholar.org/paper/A-fully-integrated-CMOS-MEMS-audio-microphone-Neumann-Gabriel/ca3dfa8cbc782410dc64c19ec10bb6ae7ebdf395
A fully-integrated CMOS-MEMS audio microphone @article{Neumann2003AFC, title={A fully-integrated CMOS-MEMS audio microphone}, author={John J. Neumann and Kaigham J. Gabriel}, journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat.
MEMS microphone fully-integrated CMOS cap-less ...
https://ieeexplore.ieee.org/document/7974101
MEMS microphone fully-integrated CMOS cap-less preamplifiers Abstract: A pair of completely integrated capless preamplifiers (not requiring external capacitance) for MEMS microphones are presented. The devices exploit specific circuit solutions to implement a proper dc biasing of the pre-amplifier and a low frequency ( ; 1 Hz) high-pass pole.
MEMS microphone fully-integrated CMOS cap-less ...
https://www.semanticscholar.org/paper/MEMS-microphone-fully-integrated-CMOS-cap-less-Croce-Berti/3cff6e7b5e550701587d3987ba9d3ad627cf92d3
DOI: 10.1109/PRIME.2017.7974101 Corpus ID: 9002647; MEMS microphone fully-integrated CMOS cap-less preamplifiers @article{Croce2017MEMSMF, title={MEMS microphone fully-integrated CMOS cap-less preamplifiers}, author={Marco Croce and Claudio De Berti and Lorenzo Crespi and Piero Malcovati and Andrea Baschirotto}, journal={2017 13th Conference …
MEMS Laboratory | Abstract: CMOS-MEMS Membrane for Audio ...
https://research.ece.cmu.edu/~mems/pubs/show.php?pub_id=21
CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation J. Neumann and K. Gabriel ABSTRACT: Using CMOS-MEMS micromachining techniques we have constructed a prototype earphone that is audible from 1 to 15 kHz. The fabrication of the acoustic membrane consists of only two steps in addition to the prior post-CMOS micromachining steps developed ...
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